Applications

ADE Corporation
Westwood, MA

ADE's Galaxy AFS-300 is the first automated production 300mm wafer flatness measurement. The AFS-300 is capable of accurate and precise measurements at the 0.12 um site flatness specification level, which supports both 0.25 um and 0.18 um design rules, as defined by the NTRS road map. The AFS-300 offers the optimal combination of measurement accuracy, contamination-free handling and throughput for production wafer flatness and shape measurements.